Kore Systems: Other Surface Techniques
Laser Ablation Coater.

University of Surrey, UK

This stand-alone, UHV-capable vacuum instrument with vacuum instrumentation and motor control was designed for the University of Surrey in the U.K., to allow various samples (including 150mm and 200mm wafers) to be coated by material ablated from a target material using a suitable laser.


A magnesium fluoride window allows minimum attenuation of the laser beam intensity as it enters the vacuum system. The system has also been designed to permit laser ablation coating to take place in high pressure, specialised gas mixtures. An on-board gas manifold system permits this gas mixing.


One of the interesting aspects of this instrument is the target stage design, created especially for this project. The target stage rotates and translates under the laser beam such that a spiral set of non-overlapping laser ablation craters is created. This has been implemented to allow maximum use of the target material.


Kore Technology is a centre of excellence in time-of-flight mass spectrometer technology and has a very strong R&D capability in terms of its personnel, all of whom have been heavily involved in a variety of analytical instrumentation development programmes.


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If you wish to purchase our products, please contact Kore sales at sales@kore.co.uk, or call +44 (0)1353 653030.

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