Industry & Process:
Quality Control
Contamination of Semi-Conductors.
Applications: Contamination of Semi-Conductors
Perfluorinated compounds (PFC) are widely used in semiconductor manufacturing facilities as heat exchange fluids and cleaning agents. They are usually considered harmless due to their inert chemical behaviour. However PFCs will cause contamination problems when the facility is a 28nm(or lower) process FAB.
The MS200 is a high sensitivity portable analytical device that can be used to monitor PFC concentrations or quickly locate leakage in a semiconductor FAB plant.
EXPERIMENT
PFC target compounds
3M ™ Fluorinert ™ Electronic Liquid FC-40 (Figure 1) is a clear, colorless, thermally stable, fully- fluorinated liquid intended for use in single phase heat transfer applications in the semiconductor manufacturing industry.
3M ™ Fluorinert ™ Liquid FC-3283 (Figure 2) is a non-conductive, thermally and chemically stable liquid also for use in single phase heat transfer applications, especially in the electronics and semiconductor industry for etchers, ion implanters, testers, etc.
The Galden HT® series (Figure 3) is a line of dielectric fluids with desirable dielectric properties an high chemical stability, designed for heat transfer in etchers, CVD, PVD and Ion Implanters.
Example spectrum
Example sensitivity
Even after dilution of a 600 ppb FC 40 gas sample to 600 ppt, we can still find the m/z=214 of FC40
On-site FAB results
MS200 provides outstanding performance in PFC and other VOCs monitoring. Without any gas cylinder needed the MS200 gives an easy portable mass spectrometer to anywhere you want. A 30 seconds analysis time means we can get real time results.
| ppb | ||||||||
|---|---|---|---|---|---|---|---|---|
| Location | site A | site B | site C | site D | site E | site F | site G | site H |
| HT series | 18.4 | 11.3 | 10.2 | 11.6 | 30.6 | 15.9 | 22 | 16.3 |
| FC3283 | 0 | 4 | 3.8 | 2.8 | 5.1 | 0 | 2 | 0 |
| PFTBA | 0 | 0 | 0 | 0 | 15.1 | 0 | 0 | 0 |
| FC40 | 62.1 | 15.1 | 28.1 | 20.6 | 20.3 | 35.5 | 113 | 53.9 |
| Total amount | 80.5 | 30.4 | 42.1 | 35 | 71.1 | 51.4 | 137 | 70.2 |
PRICING AND ORDERING
Kore Technology is a centre of excellence in time-of-flight mass spectrometer technology and has a very strong R&D capability in terms of its personnel, all of whom have been heavily involved in a variety of analytical instrumentation development programmes.
If you have any questions please feel free to contact us via our online form or telephone us for more information, we offer a wide range of products and services to suit your requirements.
If you wish to purchase our products, please contact Kore sales at sales@kore.co.uk, or call +44 (0)1353 653030.
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