The Kore Ultra-high precision and stability UHV stage is suitable for high spatial resolution surface analysis. This is a fully bakeable stage, with 20mm of travel in the x,y and z directions, with full rotation and sample isolation of 5kV available. It has been designed with low drift and high stability so that it can be used in situations where a long raster scan of an analysis probe is required such as in a high spatial resolution (10nm) secondary ion microprobes.
The stage is designed so that it can be customised for a client application. The ‘generic form’ is shown here.
On top of this, a customer-specific ‘front end’ is built. An example of a 4 position, back-mounting sample stage for SIMS is shown here.
Kore Technology is a centre of excellence in time-of-flight mass spectrometer technology and has a very strong R&D capability in terms of its personnel, all of whom have been heavily involved in a variety of analytical instrumentation development programmes.