Ultra-high precision and stability UHV stage
The Kore Ultra-high precision and stability UHV stage is suitable for high spatial resolution surface analysis.This is a fully bakeable stage, with 20mm of travel in the x,y and z directions, with full rotation and sample isolation of 5kV available. It has been designed with low drift and high stability so that it can be used in situations where a long raster scan of an analysis probe is required such as in a high spatial resolution (10nm) secondary ion microprobes.
The stage is designed so that it can be customised for a client application. The 'generic form' is shown here.
On top of this, a customer-specific 'front end' is built. An example of a 4 position, back-mounting sample stage for SIMS is shown here.
Last updated: Tuesday, August 16, 2005, 18:16
© Kore Technology Limited 2005