LaB6/CeBix™ Rebuilding Services
Certain cathode types are very expensive to purchase. Some e-beam lithography systems use a full Vogel mount cathode with a very complicated structure. Some Auger systems require the cathode and grid cap be assembled with very high precision using specialized equipment. As a service to our customers, Aptech refurbishes used cathodes of these types at a fraction of the price of a new cathode. The used cathode or grid cap assembly is first disassembled and all parts that are to be reused are carefully inspected or cleaned. The unit is then reassembled with whatever new parts are necessary. In the case of grid cap assemblies, the cathode tip is properly aligned and the spacing with the cap is adjusted to the original manufacturer's specifications.
|Manufacturer||System||Description||LaB6 P/N||CeBix P/N|
|ElectroScan/Philips||2020 Environmental SEM||Grid Cap Assembly||95939||95940|
|XL Environmental SEM||Grid Cap Assembly||95941||80101|
|Etec||Lithography||Grid Cap Assembly, 60°/60µ||97224||80102|
|Lithography||Grid Cap Assembly, 90°/30µ||97225||80103|
|JEOL||JBX-5D Lithography||Vogel Mount Cathode||15615||15853|
|JBX-5DII Lithography||Vogel Mount Cathode||14017||15852|
|JAMP10 Auger Microprobe||Vogel Mount Cathode||11802||15851|
|LEO/Zeiss||SEM||Grid Cap Assembly||16141||16494|
|TEM||Grid Cap Assembly||18722||18723|
|PHI||590 Auger Microprobe||Grid Cap Assembly||11817||15854|
|595 Auger Microprobe||Grid Cap Assembly||11824||15855|
|600, 650 & 660 Auger Microprobe||Grid Cap Assembly||11826||15856|
|610 Auger Microprobe||Grid Cap Assembly||12854||15857|
CeBix™ - An Aptech Exclusive
Available exclusively from Aptech, CeBix (ultra-high purity cerium hexaboride) is characterized by 30 to 70% longer lifetimes and better contamination resistance. For an additional charge, you may have your cathode rebuilt with a CeBix crystal instead of a LaB6 crystal.
Ordering and further information
To place an order, obtain a quote, or ask a question not answered on this web site please contact Barrie Griffiths at Kore Technology Ltd via email () or other means.
Last updated: 17:34 08/05/2018
© Kore Technology Limited 2005